For example: Agilent E4440A or Anritsu 68369
R8340 Ultra-High Resistance Meter
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Advantest R8340 Overview
Measurement of Micro Current from 10 fA to 19.999 mA Measurement of High Resistance from 10 to 3 1016 High-Speed Charge/Discharge High-Speed Measurement with 100 Samples/Second Floating Measurement of 1100 VDC Standard GPIB Interface