For example: Agilent E4440A or Anritsu 68369
Advantest R8340A Resistance Meter
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Model:R8340A
Manufactured by: Advantest
Category:RCL Measurement Instruments
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Advantest R8340A Overview
The R8340A digital ultra-high resistance/micro current meters use an input amplifier gain switching type I-V converter, highspeed sampling A/D converter and low-noise high-response voltage generator. They are fast and precise, with a range from 10 fA to 19.999 mA for current measurement and 10 to 3 × 1016 for resistance measurement.