For example: Agilent E4440A or Anritsu 68369
The Aeroflex 6813 20.00 GHz Signal Generator
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Aeroflex IFR 6813 Overview
The 6813A (10 MHz to 20 GHz) and 6815A (10 MHz to 40 GHz) microwave generators have been developed from the successful 6820A series of microwave scalar analyzers but the performance specifications of the source have been re-qualified for phase noise both closer in and further out.