For example: Agilent E4440A or Anritsu 68369
350 Phase Meter
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Anritsu 350 Overview
The 350 Phase Meter has a frequency range of 10Hz to 2MHz. 1 mV to 2 V rms or 50 mV to 100 V rms in two switch selected ranges. Input impedance of 1 Mohms shunted by 26 pF. DC voltage output is proportional to measured phase angle at 10 mV/degrees. Accuracy of phase out signal of ?(0.1 degree + 0.3%) of phase angle measured full scale.