For example: Agilent E4440A or Anritsu 68369
Ultra Low Noise Synthesized Signal Generator, 10 MHz to 20 GHz
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Anritsu 69147B Overview
The Anritsu 68C/69B series are your best choice for A.T.E. applications. They pack the highest performance available in a single 13.3 cm package to minimize rack space. High output power assures adequate signal strength to the device under test even after A.T.E. switching and cabling losses.
Anritsu 69147B All Available Options 
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