For example: Agilent E4440A or Anritsu 68369
Ultra Low Noise Synthesized Signal Generator, 10 MHz to 20 GHz
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Anritsu 69147B Overview
The Anritsu 68C/69B series are your best choice for A.T.E. applications. They pack the highest performance available in a single 13.3 cm package to minimize rack space. High output power assures adequate signal strength to the device under test even after A.T.E. switching and cabling losses.