For example: Agilent E4440A or Anritsu 68369
Power Sensor, Diode, 10 MHz to 32 GHz, -70 to +20 dBm
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Anritsu MA2473D Overview
The Anritsu MA247XD Series Power Sensors are broadband microwave measurement components. All models are used with the ML2430A Series Power Meters, 10 MHz - 32 GHz.