For example: Agilent E4440A or Anritsu 68369
Power Sensor, Diode, 10 MHz to 6 GHz, -60 to +20 dBm
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Anritsu MA2481A Overview
Power sensor for ML2430 series power meter (sold separately) 10 MHZ to 6 GHZ frequency range -60 to +20 dBm dynamic power range
SWR < 1.90; 10 - 50 MHz < 1.17; 50 - 150 MHz < 1.22; 2 - 6 GHz
Sensor Linearity 3% (1.8% CW with option 1)