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Bird Electronics 8890-300SC13 Overview
** No warm-up time
** Ultra-stable: 0.1 dB total change in VSWR from 0 to 100% rating power at 13.56 MHz
** Passive design
** Ultra-low VSWR typically 0.05:1 at process critical frequencies
** Homogeneous RF design provides long-term repeatability
For maximum process repeatability and consistency, modern plasma applications require precise RF power regulation and control. A key component in ensuring accurate and repeatable RF power delivery to the chamber is calibration, regulation, and monitoring of the RF generator.
Bird now offers ultra-stable, low VSWR loads for quick and precise measurement of generator power output when used with precision power sensors such as the Bird 4020 & 4027A Series.
Bird models 8865SC13, 8890-300SC13, 8921SC13 & 8931-115SC13/-230SC13 not only provide low VSWR but also less than 0.1 dB total change in VSWR at process critical frequencies.