For example: Agilent E4440A or Anritsu 68369
50 ohm Diode CW Power Sensor
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Boonton 51015 Overview
Frequency Range (100 kHz to 18 GHz)
Dynamic Range (-50 to +30 dBm)
Overload Rating Pulse / Continuous (10 W for 1µs 2 W)
SWR:
100 kHz - 1 GHz - 1.10
1 GHz - 2 GHz - 1.12
2 GHz - 4 GHz - 1.18
4 GHz - 12.4 GHz - 1.28
12.4 GHz - 18 GHz - 1.07