For example: Agilent E4440A or Anritsu 68369
100 kHz, 1-3000 pF, Analog Capacitance Meter
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Boonton 72C Overview
Features:
- Rapid, accuarte, low test-lvls
- 3 terminal measurement
- Programmable
- DC output respns time to 50 us
- Q value as low as 1
- Hi-Speed Anlaog