For example: Agilent E4440A or Anritsu 68369
25 kHz to 125 kHz - Amplifier
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ENI PL-2 Overview
The ENI PL-2 is a Variable Frequency RF Plasma Generator. Frequency Range: 25 to 125 kHz. Rated power output:1600W. RF output impedance: 50 to 600 ohms. Air cooled.