For example: Agilent E4440A or Anritsu 68369
Megohmmeter
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Guildline 6500A Overview
The Guildline 6500A TeraOhmeter is a microprocessor based, fully automated, high precision device for measuring high value resistors or very small DC currents. The 6500A is capable measuring resistance from 100 kOhm to 100,000 TeraOhms with test voltages ranging from 1 VDC to 1000 VDC and measuring current down to 10 femptoamps.