For example: Agilent E4440A or Anritsu 68369
Dual-band 1kHz/1MHz Capacitance Meter
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Hioki 3506-10 Overview
Hioki LCR and Impedance Analyzers range from 1mHz to 1.3GHz devices to suit a wide range of applications in the testing of electronic components. The 3506-10 is a dual-band capacitance tester designed to be integrated with automatic taping machines and sorters for production of MLCC (multi-layer ceramic capacitors).