For example: Agilent E4440A or Anritsu 68369
RLC Impedance Meters
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Hioki 3532-50 Overview
Impedance meter with a wide test frequency range.
The measurement frequency can be freely adjusted with four-digit precision in a wide range from 42 Hz to 5 MHz. In particular, this makes it easy to test sample characteristics in the high frequency range. Operation is extremely simple; touch the item on the screen to be changed, and the possible settings appear in sequence.