For example: Agilent E4440A or Anritsu 68369
Ultra-High Resistance/Ultra-Low Current Meter
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Hioki DSM-8104 Overview
0.1V to 1000V/1x10^3O to 3x10^16O Digital Super Megohmmeter for Testing Leak Current of Capacitive or Highly Insulated Materials
The Hioki DSM Series Super Megohmmeters are capacitance and high insulation resistance meters with a 0.1 fA resolution for testing current. The DSM-8104 is a single-channel meter, ideal for practical measurement applications in semiconductor and electronic materials research.
- Measure insulation resistance of capacitive/highly insulated materials at high speed with high accuracy
- Resistance measurement range : 1 x 10^3 to 3 x 10^16 O
- Low current measurement: 0.1 fA to 10 mA
- Testing voltage: 0.1 V DC to 1000 V DC
- Histogram display of selected results
- Compatible for measurement of several sample types with electrodes & other devices