For example: Agilent E4440A or Anritsu 68369
1616 Precision Capacitance Bridge
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IET 1616 Overview
Neatness is essential. The panel layout of the 1616 Precision Capacitance Bridge is unusually neat? only the capacitor and, if desired, and external standard for comparison measurements are connected to the front panel; the oscillator and detector are connected in the rear. Covers from 10Hz to 100kHz frequency range. Three-terminal capacitance measurement range of 10-7 pF to 10 ?F in 12 decades. Accuracy of ?10 ppm (when most significant decade is 1, 10, or 100 pF/step). Three terminal conductance measurement range of 100 amhos to 100 ?mhos in five decades. Accuracy of ?(0.1% + 1 step in least significant decade). Will accept up to 150 V input from oscillator (oscillator and detector sold seperately).