For example: Agilent E4440A or Anritsu 68369
1656 Impedance Bridge
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IET 1656 Overview
The General Radio 1616 Precision Capacitance Bridge is one of three units (sold separately) required to make up the 1621 Precision Capacitance Measurement System.
When used with an oscillator and a detector equivalent to the 1316 and 1238 the 1616 Capacitance Bridge will perform as follows: A wide range of capacitances can be measured, extending from the resolution limit of 0.1aF to a maximum of 10uF with internal standards, and further with external standards.
For 3-terminal unknown capacitors, a pair of coaxial terminals is provided; for 2-terminal coaxial "unknowns", a single precision connector facilitates exacting control of fringing effects.