For example: Agilent E4440A or Anritsu 68369
LCR / Impedance Meters
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IET CS-300 Overview
The IET CS-300 Capacitance Substitution Box is an economical, easy to use stable capacitance source for engineering or laboratory use. The CS-300 provides 4% accuracy from 100 pF to 99,9999 F in a direct reading compact durable platform.