For example: Agilent E4440A or Anritsu 68369
Test Fixture
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Keithley Instruments 4200-SCS Overview
The Keithley Model 4200-SCS performs laboratory grade DC and pulse device characterization, real-time plotting, and analysis with high precision and sub-femtoamp resolution. It is the best tool available for interactive parametric analysis and device characterization. It offers the most advanced capabilities available in a fully integrated characterization system, including a complete, embedded PC with Windows XP operating system and mass storage. Its self-documenting, point-and-click interface speeds and simplifies the process of taking data, so users can begin analyzing their results sooner.