For example: Agilent E4440A or Anritsu 68369
502A Millohmmeter
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Keithley Instruments 502A Overview
The 502A Millohmmeter is designed for fast, accurate low resistance measurements in the laboratory and the field. Sensitivity: 10 Toneohm Accuracy: 3% of full scale Dissipation: <2 mW Voltage Across Sample: <25 mV p-p