For example: Agilent E4440A or Anritsu 68369
Micro-Ohmmeter
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Keithley Instruments 580 Overview
The Keithley 580 is a 4.5 digit autoranging Micro-Ohmmeter featuring seven ranges from 200 milliohms to 200 kilohms. Maximum resolution is 10 micro-ohm. The 580 features digital calibration through the front panel or via the optional gpib bus. Calibration constants are stored in non-volatile RAM.
The 580 has dry circuit test modes that limit the applied voltage to 20 mV on the three lowest ranges. Relative reading displays permit subtraction of base readings. A choice of pulsed current or positive or negative dc current is selectable.