For example: Agilent E4440A or Anritsu 68369
C-V Analyzer
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Keithley Instruments 590 Overview
The Keithley Model 590 C-V Analyzer measures capacitance versus voltage (C-V) and capacitance versus time (C-t) characteristics of semiconductor devices. Unlike other capacitance measurement instruments, the Model 590 has been tailored to the requirements of semiconductor device testing.