Keithley Instruments 590-CV Overview

High frequency (100kHz or 1MHz) CV measurements are commonly applied to test p-n or schottky junction and Metal-Insulator-Semiconductor (MIS) devices for device characterization and process control. CV results are highly correlated with performance parameters of functional devices such as FETs, memory cells, CCDs, and isolation structures.Features and specifications of the Keithley 590 CV Analyzer include:

• Ranges up to 20 nF (at 100 kHz, using the Model 5904 adapter) to test large, leaky, or forward biased devices
• 0.1 fF sensitivity to test small devices
• Test signal voltage of 15mV rms
• Choice of 1 MHz frequency for compliance with existing test standards or 100 kHz for improved resolution, range, and accuracy
• Selectable measurement rate (1 to 1000 readings per second) and filter to optimize speed/resolution
• Sophisticated correction for transmission line errors due to device connections
• Built-in test setup and correction value storage, analysis, and plotter control to minimize computer programming
• 100 kHz, 1 MHz, or 100 kHz / 1 MHz test frequencies
• Measures capacitance (10 fF-20 nF) and conductance (0.1 nS-1 µS)
• Internal correction for errors due to cables, connections, and switching paths
• Built-in test setup and correction value storage, analysis, and plotter control to minimize computer programming

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