For example: Agilent E4440A or Anritsu 68369
595 Quasistatic C-V Meter
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Keithley Instruments 595 Overview
Keithley calibration and verification sources have been designed to calibrate capacitance measurement equipment operating at frequencies to 1MHz. The sources are configured for 3-terminal (shielded) capacitance and conductance measurements. They use stable glass dielectric capacitors and high-quality film resistors, both with very low residual impedance. The sources are specified at 1kHz, 100kHz, and 1MHz, and the conductance sources are specified at DC, 100kHz, and 1MHz. Their calibration is traceable to the National Institute of Standards and Technology.