For example: Agilent E4440A or Anritsu 68369
604 Electrometer
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Keithley Instruments 604 Overview
The Keithley 502 Millohmmeter is a sturdy, portable instrument designed for fast, accurate, low resistance measurements in the laboratory and the field. Range 0.001 ohm to 1000 ohms full scale. Min resistance: 0.00003 ohm. Accuracy is 3% of full scale on all ranges except lowest range where it is 5%.