For example: Agilent E4440A or Anritsu 68369
610C Electrometer
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Keithley Instruments 610C Overview
The 610C Electrometer is an analog instrument with a wide range of capabilities. To optimize measurement results under different conditions, two measuring modes are provided: shunt (NORMAL) which provides selectable input resistance on VOLTS, or feedback (FAST) which provides low input voltage as an ammeter or coulomb meter. This is a small, solid-state unit with a grounded-input and very low drift. It's easy to use and measures voltage (0.001 to 100 V in 11 ranges), resistance (100 to 10E+14-ohms), current (10E-14 A full scale to 0.3 amps in 28 ranges), and coulombs (10E-13C full scale to 10E-05C). AC line operation.