For example: Agilent E4440A or Anritsu 68369
Electrometer
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Keithley Instruments 614 Overview
The 614 Digital Electrometer is a 4 1/2 digit multimeter designed with speed and simplicity of use. It features four functions: current, resistance, voltage and charge measurement. It is capable of detecting currents as low as 10 -14 A and resistances up to 2 x 10E+11 ohms. It provides more than 5x10E+13 ohms input impedance on the voltage ranges and can detect charge over a range of 10E-14 to 2 x 10E-08C. Voltage ranges are 0.2 V to 20 V in 3 ranges with accuracies to 0.08%. Current ranges from 20 pA to 2000 µA in 9 ranges with accuracies from 1.5 to 0.3%. Resistance ranges are from 2 kohms to 200 Gohms in 9 ranges with accuracies from 0.5 to 2%.