For example: Agilent E4440A or Anritsu 68369
640 Electrometer
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Keithley Instruments 640 Overview
Voltage: 30 µV full scale to 30 V in 13 - 1X and 3X ranges. Coulombs: 2x10-14 FS to 6x10-10. Current: 10-15 A full scale to 10-5 A (3X range). Remote head, battery operation, analog output.