For example: Agilent E4440A or Anritsu 68369
6521 Low Current, 10 Channel Scanner Card
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Keithley Instruments 6521 Overview
The Keithley 6521 Low Current Scanner Card is a 10-channel multiplexer, designed for switching low currents in multipoint testing applications or when the test configuration must be changed. Offset current on each channel is <1pA and high isolation is maintained between each channel (>1015). The Model 6521 maintains the current path even when the channel is deselected, making it a true current switch. BNC input connectors help provide shielding for sensitive measurements and make the card compatible with low noise coaxial cables. The Model 6521 is well suited for automating reverse leakage tests on semiconductor junctions or gate leakage tests on FETs.