For example: Agilent E4440A or Anritsu 68369
Confocal Laser Sensor
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Keyence LT-9010M Overview
LT-9000 Surface Scanning Laser Confocal Sensor The LT-9000 Surface Scanning Laser Confocal Displacement Meter excels in measuring micron-level defects or thicknesses without being affected by target color or angle. The confocal principle requires only that the light reflect off a surface and be focused onto the receiver meaning the sensor is immune to changes in color, reflectivity, and angle for robust and stable measurement. With a 2µm beam spot, and the LT-9000's unique surface scanning feature, the LT-9000 not only provides a simple displacement but can also provide profiles of even the smallest features.
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