Keysight / Agilent 10766A Overview

The Agilent 10766A Linear Interferometer is used for general purpose single axis measurements and can be employed when the interferometer is the moving component, instead of the measurement reflector. It has a rugged, thermally stable stainless steel housing.

It is optically identical to the 10702A option 001. However, the 10766A has a more robust housing and metric threads.

The 10766A includes one 10767A Linear Reflector as a reference reflector. A 10703A is needed to complete the linear measurement optic set. The interferometer cannot be used to bend the beam. It can be the moving component without any modification.

Differential operation requires removing the 10767A Linear Reflector and attaching it to the reference surface of interest.

Features:

• Application: General purpose
• Distinguishing Feature: Minimal beam deviation
• # of Axis: 1
• Maximum Beam Size: 6 mm
• Beam Separation: 11 mm (0.43 in)
• Weight: 312 g (11 oz)
• Fundamental Optical Resolution: ?/2 (316.5 nm, 12.5 µin)
• System Resolution: ?/64 (10 nm, 0.4 µin) based on using 32x electronic resolution extension
• System Resolution: ?/512 (1.2 nm, 0.047 µin) based on using 256x electronic resolution extension
• Reflector: 10767A
• Mount Used: 10785A
• Referenced: Yes
• Turned Configuration: No

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