For example: Agilent E4440A or Anritsu 68369
High-Resolution Laser Axis Board for VME
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Keysight / Agilent 10897A Overview
The HP Agilent 10896B compensation board increases the accuracy and repeatability of Agilent's VME-based laser interferometer positioning systems. Using your own or Agilent's environmental sensors, the Agilent 10896B detects and compensates for changes in the system's operating environment. The Agilent 10751C/D air sensor can be used to provide an accuracy up to ±1.5 ppm. Agilent 10757D/E/F material temperature sensors are used to compensate for thermal expansion errors.