Keysight / Agilent 10897B Overview

The Agilent 10897B VMEbus laser axis board offers the highest measurement resolution commercially available in positioning systems. With resolution up to 0.3 nm, it provides ultra-precise position (or distance) information for advanced products such as IC fabrication equipment. The Agilent 10897B is tested at frequencies equivalent to 0.7 m/s plane mirror slew rates.

The register-programmed position axis board provides a 36-bit position word in fractional wavelengths. The word is readable over the VMEbus and is also available from a real-time hardware output on the A and C rows of the P2 connector. Its very high data rates accommodate high-bandwidth, high-performance closed-loop applications. Configured with appropriate laser and optics components, the Agilent 10897B supplies unsurpassed positioning accuracy for dynamic measurements.

Features:

• VMEbus Position Output
• Data Format:
• Units: fractions of a wavelength
• 2''s Complement: choose any 32 of 35 bits to read
• Positive Logic
• Least Significant Bit (or one count) equals resolution
• Data Rate Over Backplane: >100 kHz
• Sample Data Age:
• Fixed: After a synchronous sample operation, the value in the position register will reflect the actual position that occurred approximately X ns before the sample operation was initiated. There are two user-selectable values of X, 290 ns and 790 ns.
• Variable (typically): <800 ps over the full power supply voltage specification, and <60 ps/ degree C.
• Sample Delay:
• The position register may be read 100 ns or 600 ns after a hardware sample operation, via the sample delay register bit.
• P2 Connector Hardware Position Output
• Data Format:
• Units: fractions of a wavelength
• 2''s complement: 36-bit parallel binary
• Positive Logic
• Least Signigicant Bit (or one count) equals resolution
• Data Update Rate: 10 MHz (Hardware included to synchronize to slower clocks)
• Data Age:
• Fixed: The data on the hardware output line will reflect the position that occurred approximately 1.2 us before the next rising edge of the 10 MHz clock.
• Variable (typically):
• <800 ps over the full power supply voltage specification, and <60 ps/degree C.
• General Information
• VME Compliance:
• Complies with VME Specification Rev. C.1 6U size
• A16 Data Transfer Cycles
• D16 Data Transfer Cycles
• A24 Data Transfer Cycles
• D32 Data Transfer Cycles
• D08(O) Interrupt Acknowledge Cycles
• Power Requirements:
• 5 Vdc + 0.25 V/-0.125 V at less than 3.5 A
• +12 V +/-0.5 V at less than 0.1A
• -12 V +/-0.5V at less than 0.025A
• Cooling Requirements:
• 19 linear meters (60 linear feet) per minute for 0-40 degrees C operation 76 linear meters (250 linear feet) per minute minimum for 0-55 degrees C operation
• Weight: 0.45 kg (1 lb)
• Reduced data age ambiguity ensures dynamic accuracy
• Low noise rating improves repeatability
• Full electrical and mechanical compliance with VMEbus specifications
• Programmable signal routing
• Integrated board functions reduce system size, complexity, development time, and cost

General

• Platform and size: VME, 6U
• Number of Axes per Board: 1
• Resolution Extension: x256
• External Sample and Data Hold Inputs: 4 + 1

Operation with Plane Mirror Optics

• Resolution: 0.62 nm
• Maximum Velocity (also limited by laser head): 700 mm/sec

Timing

• Position Data Update Rate: 10 MHz
• Asynchronous Sample or Hold Uncertainty: ± 50 ns
• Synchronous Sample or Hold Uncertainty: < 800 ps + < 60 ps / deg C

Special Features

• Flexible Hardware IO
• Programmable signal routing
• 36-bit, 2´s Complement Hardware Position Output @ 10 MHz
• 10897B HAS BEEN REPLACED BY 10897C, WHICH IS IDENTICAL BUT ALSO HAS CE COMPLIANCE

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