For example: Agilent E4440A or Anritsu 68369
Phase Noise Measurement System
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Keysight / Agilent 3048A Overview
The 3048A system software uses the HP 11848A interface to demodulate the phase noise of a carrier in the frequency range of 5 MHz to 18 GHz (and beyond with external, user supplied mixers) and measures the resulting baseband signal with the analyzers.