For example: Agilent E4440A or Anritsu 68369
Semiconductor Parameter Analyzer
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Keysight / Agilent 4145A Overview
The 4145A Semiconductor Parameter Analyzer performs high speed DC characterization of semiconductor devices and materials automatically, saving you time and money. It has four programmable stimulus/measurement units capable of high resolution plus wide range sourcing and sensing (1 pA to 100 mA; 1 mV to 100 V).
Other features include built-in graphics analysis functions including marker and cursor which provides direct numeric readouts and a line function for automatic calculation of line gradient and X-Y axis intercept values. For greater versatility and capabilities the HP 4145A incorporates a built-in flexible disc drive for permanent storage of user programs and measurement results.