For example: Agilent E4440A or Anritsu 68369
Semiconductor Parameter Analyzer
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Keysight / Agilent 4145B Overview
The 4145B Semiconductor Parameter Analyzer is able to offer complete dc characterization of semiconductor devices and materials.
The 4145B stimulates voltage and current sensitive devices, measures the resulting current and voltage response. It also offers fully automatic, high-speed dc characterization of semiconductor devices, high resolution, wide range sourcing and measurement, I: 1pA - 100mA, V: 1mV - 100V, a maximum 1150 measurement and display points, flexible graphic analysis functions for quick parameter extraction, and built-in micro flexible disc drive for storage of 240 user programs or 105 measurement results.