For example: Agilent E4440A or Anritsu 68369
Semiconductor Parameter Analyzer
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Keysight / Agilent 4155B Overview
The 4155B Semiconductor Paramer Analyzer is used to evaluate materials with measurements to 1 fA and 1 µV, automatically extract process parameters without manually manipulating screen markers, measures leakage characteristics with ultra-low leakage SMUs, automates device characterization with integrated pulse generators and selector switches.