For example: Agilent E4440A or Anritsu 68369
Modular Semiconductor Parameter Analyzer
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Keysight / Agilent 4157B Overview
General Features
- Flexible, expandable and upgradeable modular parametric instrument controlled via I/CV 3.0 Lite software
- Ultra low current measurement without external preamplifiers
- Flexible to provide stable 100aA measurements
- Switch between CV and IV measurement without wasting time swapping cables
Measurement Capabilities
- 1 femtoamp current measurement resolution without external preamplifiers (High-Resolution SMU)
- 100 attoamp current measurement resolution using HRSMU with Atto Sense & Switch Unit (ASU)
- 10 femtoamp and 0.5 microvolt measurement resolution (Medium-Power SMU)
- +/- 200 Volts and +/- 1 Amp output by High-Power SMU
I/CV 3.0 Lite Software Capabilities
- Drivers for all of the popular semiautomatic wafer probers
- Intuitive GUI-based switching matrix control for the B2200A, B2201A, and E5250A
- Test sequencer for automating testing across an entire wafer
- Post-test graphical analysis and wafer mapping capability