For example: Agilent E4440A or Anritsu 68369
Vector Impedance Meter
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Keysight / Agilent 4193A Overview
The 4193A measures impedance magnitude and phase. The 4193A Vector Impedance Meter measures impedance magnitude from 10 mohms to 120 kohms and phase from -180.0º to +180.0º. An internal oscillator provides test signals from 400kHz to 110MHz. The test signal is constant current between 10 µA, depending on impedance range (10 ohms-100 kohms, 5 ranges). The 4193A features test components in circuit and out-of-circuit and standard HP-IB and analog outputs. Other features include auto, hold, manual range control and a 3 1/2-digit display.