For example: Agilent E4440A or Anritsu 68369
Digital LCR Meter
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Keysight / Agilent 4262A Overview
The 4262A Digital LCR Meter features self-test capability and is designed to measure the parameter of an impedance element with high accuracy and speed. The measurement circuit for the device to be measured is capable of both parallel and series equivalent circuit measurements and the measured values are displayed by the two, three-full digits LED displays on the front panel. " Capacitance: 0.01 pF to 19.99 mF " Inductance: 0.01 µH to 1999 H " Resistance: 1 mohms to 19.99 Mohms " Basic accuracy: 0.2 to 0.3%; 120Hz, 1kHz, and 10kHz.