For example: Agilent E4440A or Anritsu 68369
Automatic Capacitance Bridge
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Keysight / Agilent 4270A Overview
Conductance ranges from 899.9 nmhos to 8.999 mmhos.
Offers 5-digit readout of capacitance from full-scale ranges of 18.000 pF to 1.2000 µF with 0.001 pF resolution and measurement speed of 0.5 seconds.
Four measurement frequencies from 1kHz to 1MHz.
Basic accuracies (±n% of reading + number of digits): capacitance (0.2-0.5 + 1), conductance (1-3 + 10), dissipation [1-3 + (10 + internal capacitor/capacitance measured)].
The Agilent HP 4270A Automatic Capacitance Bridge automatically measures capacitance, equivalent parallel conductance, and dissipation factor.