For example: Agilent E4440A or Anritsu 68369
1 MHz C Meter / C-V Plotter
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Keysight / Agilent 4280A Overview
The 4280A 1 MHz C Meter/C-V Plotter measures the capacitance and conductance of semiconductor devices and materials as functions of applied voltage (C V) or time (C- t).
The HP 4280A consists of a precision I MHz C-G meter, a programmable dc bias source that can be swept in staircase fashion, and accurate timing control.