For example: Agilent E4440A or Anritsu 68369
Distortion Analyzer
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Keysight / Agilent 4333A Overview
Distortion Analyzer Measure ulta low distortion levels, down to 0.01% from 10Hz-100kHz, and to 0.03% to 400kHz. Input range: 1-130V rms, Voltmeter range: 100uV-100V for 20Hz to 600kHz