For example: Agilent E4440A or Anritsu 68369
Agilent 4339A High-Resistance Meter
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Keysight / Agilent 4339A Overview
Features:
- High-Resistance Meter
- Wide measurement range: 1 x 103 ohm to 1.6 x 1016ohm
- Stable test fixtures: resistivity cell, component test fixture
- High-speed measurement: 10 ms
- Test sequence programming
- Resistivity calculations
- Grounded DUT measurement
- Measurement Parameters: R (dc resistance), I (dc current), rs (surface resistivity), rv (volume resistivity)
- Mathematical Functions: Deviation and percent deviation
- Ranging: Auto and manual
- Trigger: Internal, external, manual, and HP-IB
- Delay Time: 0 to 9999 ms in 1 ms steps
- Test Cable Lengths: 2 m maximum
- Measurement Time: Short, medium, and long
- Averaging: 1 to 256
- Test Voltage: 0 to 1000 Vdc, 100 mV steps @ 0 to 200 V, 1 V steps @ 200 to 1000 V
- Maximum Current: 10 mA @ < 100 V, 5 mA @ < 250V, 2 mA @ < 500 V, 1 mA @ < 1 kV
- Current Compliance Setting: 0.5 mA, 1 mA, 2 mA, 5 mA, 10 mA