For example: Agilent E4440A or Anritsu 68369
Vector Impedance Meter
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Keysight / Agilent 4800A Overview
Frequency range of 5Hz to 500kHz in five bands with an accuracy of ±2%.
The Impedance measurement range is 1 ohm to 10 Mohms and the phase angle measurement range is 0º to ±90º.
Direct inductance measurement range is 1 µH to 100,000 H.
Direct capacitance measurement range is 0.1 pF to 10,000 µF.
The unit is equipped with analog outputs for three parameters: impedance magnitude, impedance phase, and frequency which may be used in conjunction with a two-pen X-Y recorder (sold separately) to provide permanent traces.
The Agilent HP 4800A Vector Impedance Meter measures impedance and Q.