For example: Agilent E4440A or Anritsu 68369
Signal Analyzer
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Keysight / Agilent 5423A Overview
The Agilent HP 4352B can measure the main VCO/PLL evaluation parameters, RF power, frequency, phase noise, spectrum, frequency transient, DC consumption current and FM deviation.
The unit also provides and controls the DC power supply, the low-noise DC control voltage source and the 1kHz signal source necessary for VCO tuning characterizing.