Keysight / Agilent 5517C Overview

The Agilent 5517C is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications. Option 009 allows a larger angular range of measurement by providing a 9 mm beam diameter for use with three-axis interferometers. Please contact us for custom requirements.

General

• Max Velocity with Linear Optics: 711 mm/s
• Reference frequency: 2.4 to 3.0 MHz
• Weight: 3.4 kg (7.5 lb)
• Clearance required for cabling: 10.16 cm (4 in) beyond back of unit

Laser Beam

• Diameter: 6mm (0.25 in) typical
  
  Opt 003: 3 mm (0.125 in)
  
  Opt 009: 9 mm (0.375 in)
• Minimum Output Power: 180 uW (standard)
• Minimum Output Power: 300 uW (option H01)

Electrical Power

• +15V ± 0.3V at 2.2A maximum
• -15V ± 0.3V at 0.02A maximum
• Warm-up Dissipation: 35W
• Operating Dissipation: 23W

Reliability

• Mean Time Between Failures (MTBF) greater than 50,000 hours of operation, most reliable lasers

Keysight / Agilent 5517C All Available Options

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