For example: Agilent E4440A or Anritsu 68369
Optical Pulse Power Meter
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Keysight / Agilent 8151A Overview
The Boonton 72BD Capacitance Meter provides instant, direct reading, three terminal and differential capacitance measurements from 0.001 to 2000 pF, with a resolution of 0.001 pF. The accuracy with a Q >5 is 0.25% rdg +0.2% fs., except for the 2000 pF range which is 0.4% of rdg +0.2% fs. This capacitance coverage is divided into four ranges, selected by front panel push-buttons, remotely or autoranged. These are arranged in a 2, 20, 200, and 2000 pF sequence. The digital display provides 4-digit readout, decimal point, -, overrange, and pF indications. The test signal is 15 mV at 1 MHz and has provisions for applying up to 600 V of DC bias to the test specimen.