For example: Agilent E4440A or Anritsu 68369
Microwave Network Analyzer 110GHz
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Keysight / Agilent 8510A Overview
The 8510A provides a complete solution for characterizing the linear behavior of either active or passive networks over the 45 MHz to 26.5 GHz frequency range. It features "Real Time" error-corrected measurements, 50 dB effective directivity, 40 dB effective source and load match, 70 dB to 100 dB dynamic range and 0.001 db, 0.01 degree, 0.01 nS measurement resolution.