For example: Agilent E4440A or Anritsu 68369
Microwave Network Analyzer 110GHz
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Keysight / Agilent 8510B Overview
The 8510B Microwave Network Analyzer provides a complete solution for characterizing the linear behavior of active or passive networks over the 45 MHz to 40 GHz range. Features include "Real Time" error-corrected measurements, 60 dB effective directivity and source match, 80 dB to 100 dB dynamic range, 0.001 dB, 0.01°, and 0.01 nanosec measurement resolution.